Integrated structures of high performance active devices and passive devices

ABSTRACT

Integrated structures having high performance CMOS active devices mounted on passive devices are provided. The structure includes an integrated passive device chip having a plurality of through wafer vias, mounted to a ground plane. The structure further includes at least one CMOS device mounted on the integrated passive device chip using flip chip technology and being grounded to the ground plane through the through wafer vias of the integrated passive device chip.

FIELD OF THE INVENTION

The invention relates to semiconductor structures and, moreparticularly, to integrated structures comprising high performance CMOSactive devices mounted on passive devices.

BACKGROUND

In current technology integration schemes, CMOS chips are mounteddirectly onto a substrate or ground plane using through wafer/siliconvias that are utilized by the CMOS chip for grounding directly to thesubstrate or ground plane. Depending on the integration scheme,integrated passive device chips are mounted either directly on thesubstrate or ground plane, or on the CMOS chip having active devicessuch as, for example, power amplifiers. The CMOS active devices (CMOSchip) are more advanced technology nodes than the integrated passivedevice chips. In either implementation, the CMOS chips are wire bond(WB) to signal lines, by use of bond pads placed about a perimeter ofthe CMOS chips.

Long wire bond leads add high inductance and resistance out of theactive devices of the CMOS devices. Also, the use of wire bonds adds topoor thermal properties for heat transfer. Moreover the use of bond padson the perimeter of the CMOS chip, in order to connect the wire bondleads from the CMOS devices to the signal lines, is a poor utilizationof valuable real estate. Additionally, flip chip technology is moreexpensive packaging and less flexibility is provided if both chipsrequire C4 connections.

Also, the use of through wafer/silicon vias by the CMOS chip makes itmore difficult to scale the CMOS devices. This is basically due to thefact that the through wafer/silicon vias require redesign for eachtechnology node. This results in the need to support throughwafer/silicon vias in the CMOS devices, e.g., CMOS, RFCMOS, BiCMOS,throughout different technology nodes. That is, the throughwafer/silicon vias in the CMOS devices need to be propagated anddeveloped across multiple advanced technologies. This leads to lessflexible designs and higher design and/or manufacturing costs.

Accordingly, there exists a need in the art to overcome the deficienciesand limitations described hereinabove.

SUMMARY

In a first aspect of the invention, a structure comprises an integratedpassive device chip having a plurality of through wafer vias, mounted toa ground plane. The structure further comprises at least one CMOS devicemounted on the integrated passive device chip using flip chip technologyand being grounded to the ground plane through the through wafer vias ofthe integrated passive device chip.

In another aspect of the invention, a structure comprises a packagesubstrate. The structure further comprises an integrated passive devicechip mounted to the substrate package by a plurality of through wafervias extending from a top surface to a bottom surface of the integratedpassive device chip. The structure further comprises bond pads coupledto the integrated passive device chip and wire bonds leading from thebond pads to signal lines. The structure further comprises at least oneCMOS device mounted on the integrated passive device chip using flipchip technology and grounded to the ground plane through the integratedpassive device chip and electrically connected to the signal linesthrough the wire bonds extending from the integrated passive devicechip.

In yet another aspect of the invention, a method of forming a structurecomprises forming a plurality of through wafer vias in an integratedpassive device chip. The method further comprises mounting theintegrated passive device chip on a ground plane. The method furthercomprises mounting at least one CMOS device with active components onthe integrated passive device chip using flip chip technology. Themounting grounds the CMOS device to the ground plane. The CMOS device ismounted to the integrated passive device chip on a surface remote fromthe ground plane.

In another aspect of the invention, a design structure tangibly embodiedin a machine readable storage medium for designing, manufacturing, ortesting an integrated circuit is provided. The design structurecomprises the structures of the present invention. In furtherembodiments, a hardware description language (HDL) design structureencoded on a machine-readable data storage medium comprises elementsthat when processed in a computer-aided design system generates amachine-executable representation of integrated structures of highperformance CMOS active devices and passive devices, which comprises thestructures of the present invention. In still further embodiments, amethod in a computer-aided design system is provided for generating afunctional design model of integrated structures of high performanceCMOS active devices and passive devices. The method comprises generatinga functional representation of the structural elements of integratedstructures of high performance CMOS active devices and passive devices.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

The present invention is described in the detailed description whichfollows, in reference to the noted plurality of drawings by way ofnon-limiting examples of exemplary embodiments of the present invention.

FIG. 1 shows a structure in accordance with aspects of the presentinvention;

FIG. 2 shows a structure in accordance with aspects of the presentinvention; and

FIG. 3 is a flow diagram of a design process used in semiconductordesign, manufacture, and/or test.

DETAILED DESCRIPTION

The invention relates to semiconductor structures and, moreparticularly, to integrated structures comprising high performance CMOSactive devices and integrated passive device chips. In embodiments, theCMOS active devices (CMOS chip) are more advanced technology nodes thanthe integrated passive device chips. By implementing the presentinvention, it is possible to produce low cost front end modules thathave quality passive devices while having features that support highcurrent/power amplifier applications which needs to support hightemperature/high current devices.

In implementation, the integrated passive device chip of any generationtechnology is provided as a base or substrate to house a flip chip,higher end CMOS chip containing high performance active device elements.In embodiments, the integrated passive device chip is attached (mounted)to a ground plane by through wafer/silicon vias (hereinafter referred toas through wafer vias). The integrated passive device chip is alsobonded to the CMOS chip using flip chip technology (e.g., C4 or Cupillars). The connections between the integrated passive device chip andthe CMOS active devices provide low inductance electrical ground for theactive devices such as, for example, power amplifier devices, comparedto conventional structures which require wire bonds that have higherinductance and resistance. Also, by using the integrated passive devicechip as a base, the CMOS chips can be devoid of through wafer vias.

In embodiments, the integrated passive device chip provides groundingand heat dissipation (through the integrated passive device chip) forthe CMOS devices. More specifically, the integrated passive device chipacts as a heat sink to the ground plane for the CMOS devices. Theintegrated passive device chip also provides an output connection to thesignal line. In this way, it is no longer necessary to use valuable realestate on the CMOS device for such connection. In addition, the wirebond can now be made shorter, which will reduce inductance andresistance. In addition, the CMOS chip can act as a shield for highinductance devices on the integrated passive device chip, thuseliminating the need for additional shields.

Moreover, the two chips solution allows a designer or fabricator to onlyhave to support through wafer vias in the integrated passive device chiptechnology instead of propagating and developing it across multipleadvanced technologies, e.g., CMOS, RFCMOS, BiCMOS. In this way, it isnow possible to scale the CMOS devices without the need for redesign ofthe through wafer vias. This allows the flexibility for a designer orfabricator to use a base which caters to multiple CMOS technologies,which have a variety of fabrication techniques and road maps. This alsoallows the designer to rapidly (>2× advantage) redesign or tweakelectrical parameters of their design.

FIG. 1 shows a structure in accordance with aspects of the presentinvention. In particular, the structure 10 includes a package substrateor ground plane 15 and an integrated passive device chip 20 mounted tothe ground plane 15. In this way, the integrated passive device chip 20acts as a base of the structure 10. The integrated passive device chip20 includes a plurality of through wafer vias 25, connecting to a metalline back plane 30. The metal line back plane 30 is connected to thepackage substrate or ground plane 15. In embodiments, inductors can bemoved to the integrated passive device chip 20.

In embodiments, the through wafer vias 25 can be any appropriate metalsuch as, for example, tungsten. Also, in embodiments, the through wafervias 25 can be a plurality of different through wafer vias 25 extendingthrough the integrated passive device chip 20, from a top side to abottom side. The through wafer vias 25 do not have to be insulated;although, in embodiments, insulation may be provided when connected todevices within the integrated passive device chip 20, for example.Although four through wafer vias 25 are shown, the present invention isnot limited to any specific number of through wafer vias 25.

A CMOS chip 35 with active devices such as, for example, poweramplifiers, RF devices, switches, etc., is mounted (bonded) to theintegrated passive device chip 20 using technologies such as, forexample, C4s or copper pillars 40. CMOS chip 35 is remotely positionedfrom the ground plane 15 and does not make direct contact thereto, sinceit is mounted to the integrated passive device chip 20. By using theintegrated passive device chip 20 as a base, the CMOS chip 35 (or anyother integrated monolithic chip) can be devoid of through wafer viaswhich are customarily required to connect to the metal back plane forgrounding of the active devices, amongst other functions. As such, it isnow possible to scale the CMOS devices without the need for redesign ofthe through wafer vias.

The C4s or copper pillars 40 allow the CMOS chip 35 to integrate orconnect with the passive devices on the integrated passive device chip20. In embodiments, the C4s or copper pillars 40 can also connectdirectly to one or more of the through wafer vias 25, depending on thedesign of the package and desired functionalities. The C4s or copperpillars 40 also act as an integration scheme with the integrated passivedevice chip 20 and, in embodiments, output connection to a signal line45 through bond pads 55 mounted on the integrated passive device chip20. The C4s or copper pillars 40 also provide low inductance ground.

In embodiments, the integrated passive device chip 20 can connect to thesignal line 45 by wire bonds 50. Advantageously, in the integrationscheme of the present invention it is possible to use the less valuablereal estate (e.g., chip area) of the integrated passive device chip 20for contact pads 55, to connect to the signal line 45. This is comparedto using the more costly real estate of the CMOS chip 35. Also, the wirebonds 50 from the integrated passive device chip 20 to the signal line45 is shorter, compared to conventional structures which, in turn,reduces inductance and resistance of the structure 10.

The CMOS chip 35 can act as a shield for devices on the integratedpassive device chip 20. For example, the CMOS chip 35 can shieldinductors that are on the integrated passive device chip 20. Thiseliminates the need for specially designed packages that are designed toshield the sensitive devices on the integrated passive device chip 20such as, for example, inductors. Also, in embodiments, the integratedpassive device chip 20 acts as a base technology for the grounding andheat dissipation (through the integrated passive device chip) for theCMOS chip 35. In addition, the integrated passive device chip 20 andaccompanying through wafer vias 25 provides the flexibility to be usedwith any CMOS technology or node.

FIG. 2 shows another structure in accordance with aspects of the presentinvention. In particular, the structure 10′ includes a package substrateor ground plane 15 and an integrated passive device chip 20 mounted tothe ground plane 15. In this way, the integrated passive device chip 20acts as a base of the structure 10′. The integrated passive device chip20 includes a plurality of through wafer vias 25, connecting to a metalline back plane 30. The metal line back plane 30 is connected to thepackage substrate or ground plane 15. As described above, the throughwafer vias 25 can be any appropriate metal and can be a plurality ofdifferent through wafer vias 25 extending through the integrated passivedevice chip 20, from a top side to a bottom side.

In this embodiment, a plurality of CMOS chips 35 and 35′ with activedevices such as, for example, power amplifiers, RF devices, switches,etc., are mounted (bonded) to the integrated passive device chip 20using technologies such as, for example, C4s or copper pillars 40.Although only two CMOS chips are shown, it should be well understood bythose of ordinary skill in the art that CMOS chips 35 and 35′ mayrepresent more than two CMOS chips. As discussed above, in thisintegration scheme, it is possible to eliminate the through wafer viasin the CMOS chips (or any other integrated monolithic chip) which arecustomarily required to connect to the metal back plane for grounding ofthe active devices, amongst other functions.

The C4s or copper pillars 40 provide the same advantages as discussedabove, e.g., integrate with the integrated passive device chip 20,provide low inductance ground, etc. The C4s or copper pillars 40 canconnect directly to one or more of the through wafer vias 25, dependingon the design of the package and desired functionalities.

In embodiments, the integrated passive device chip 20 can connect to thesignal line 45 by wire bond 50. Again, in this type of integrationscheme it is possible to use the less valuable real estate (e.g., chiparea) of the integrated passive device chip 20 for contact pads 55, toconnect to the signal line 45. Also, the wire bonds 50 from theintegrated passive device chip 20 to the signal line 45 is shorter,compared to conventional structures which, in turn, reduces inductanceand resistance of the structure 10. The CMOS chips 35 and 35′ can alsoact as a shield for devices on the integrated passive device chip 20.

The structures of FIGS. 1 and 2 can be manufactured using conventionaltechnologies. For example, the through wafer vias 25 in the integratedpassive device chip 20 can be formed using conventional lithographic andetching techniques. The integrated passive device chip 20 can beconnected to the signal lines 45 using conventional wire bondingtechniques. Also, the integration of the integrated passive device chip20 and the CMOS chip can be provided using known flip chip technology.The structure of the present invention, using the above fabricationtechniques, provides many advantages over conventional systems, asdiscussed above.

FIG. 3 is a flow diagram of a design process used in semiconductordesign, manufacture, and/or test. FIG. 3 shows a block diagram of anexemplary design flow 900 used for example, in semiconductor IC logicdesign, simulation, test, layout, and manufacture. Design flow 900includes processes, machines and/or mechanisms for processing designstructures or devices to generate logically or otherwise functionallyequivalent representations of the design structures and/or devicesdescribed above and shown in FIGS. 1 and 2. The design structuresprocessed and/or generated by design flow 900 may be encoded onmachine-readable transmission or storage media to include data and/orinstructions that when executed or otherwise processed on a dataprocessing system generate a logically, structurally, mechanically, orotherwise functionally equivalent representation of hardware components,circuits, devices, or systems. Machines include, but are not limited to,any machine used in an IC design process, such as designing,manufacturing, or simulating a circuit, component, device, or system.For example, machines may include: lithography machines, machines and/orequipment for generating masks (e.g. e-beam writers), computers orequipment for simulating design structures, any apparatus used in themanufacturing or test process, or any machines for programmingfunctionally equivalent representations of the design structures intoany medium (e.g. a machine for programming a programmable gate array).

Design flow 900 may vary depending on the type of representation beingdesigned. For example, a design flow 900 for building an applicationspecific IC (ASIC) may differ from a design flow 900 for designing astandard component or from a design flow 900 for instantiating thedesign into a programmable array, for example a programmable gate array(PGA) or a field programmable gate array (FPGA) offered by Altera® Inc.or Xilinx® Inc.

FIG. 3 illustrates multiple such design structures including an inputdesign structure 920 that is preferably processed by a design process910. Design structure 920 may be a logical simulation design structuregenerated and processed by design process 910 to produce a logicallyequivalent functional representation of a hardware device. Designstructure 920 may also or alternatively comprise data and/or programinstructions that when processed by design process 910, generate afunctional representation of the physical structure of a hardwaredevice. Whether representing functional and/or structural designfeatures, design structure 920 may be generated using electroniccomputer-aided design (ECAD) such as implemented by a coredeveloper/designer. When encoded on a machine-readable datatransmission, gate array, or storage medium, design structure 920 may beaccessed and processed by one or more hardware and/or software moduleswithin design process 910 to simulate or otherwise functionallyrepresent an electronic component, circuit, electronic or logic module,apparatus, device, or system such as those shown in FIGS. 1 and 2. Assuch, design structure 920 may comprise files or other data structuresincluding human and/or machine-readable source code, compiledstructures, and computer-executable code structures that when processedby a design or simulation data processing system, functionally simulateor otherwise represent circuits or other levels of hardware logicdesign. Such data structures may include hardware-description language(HDL) design entities or other data structures conforming to and/orcompatible with lower-level HDL design languages such as Verilog andVHDL, and/or higher level design languages such as C or C++.

Design process 910 preferably employs and incorporates hardware and/orsoftware modules for synthesizing, translating, or otherwise processinga design/simulation functional equivalent of the components, circuits,devices, or logic structures shown in FIGS. 1 and 2 to generate anetlist 980 which may contain design structures such as design structure920. Netlist 980 may comprise, for example, compiled or otherwiseprocessed data structures representing a list of wires, discretecomponents, logic gates, control circuits, I/O devices, models, etc.that describes the connections to other elements and circuits in anintegrated circuit design. Netlist 980 may be synthesized using aniterative process in which netlist 980 is resynthesized one or moretimes depending on design specifications and parameters for the device.As with other design structure types described herein, netlist 980 maybe recorded on a machine-readable data storage medium or programmed intoa programmable gate array. The medium may be a non-volatile storagemedium such as a magnetic or optical disk drive, a programmable gatearray, a compact flash, or other flash memory. Additionally, or in thealternative, the medium may be a system or cache memory, buffer space,or electrically or optically conductive devices and materials on whichdata packets may be transmitted and intermediately stored via theInternet, or other networking suitable means.

Design process 910 may include hardware and software modules forprocessing a variety of input data structure types including netlist980. Such data structure types may reside, for example, within libraryelements 930 and include a set of commonly used elements, circuits, anddevices, including models, layouts, and symbolic representations, for agiven manufacturing technology (e.g., different technology nodes, 32 nm,45 nm, 90 nm, etc.). The data structure types may further include designspecifications 940, characterization data 950, verification data 960,design rules 970, and test data files 985 which may include input testpatterns, output test results, and other testing information. Designprocess 910 may further include, for example, standard mechanical designprocesses such as stress analysis, thermal analysis, mechanical eventsimulation, process simulation for operations such as casting, molding,and die press forming, etc. One of ordinary skill in the art ofmechanical design can appreciate the extent of possible mechanicaldesign tools and applications used in design process 910 withoutdeviating from the scope and spirit of the invention. Design process 910may also include modules for performing standard circuit designprocesses such as timing analysis, verification, design rule checking,place and route operations, etc.

Design process 910 employs and incorporates logic and physical designtools such as HDL compilers and simulation model build tools to processdesign structure 920 together with some or all of the depictedsupporting data structures along with any additional mechanical designor data (if applicable), to generate a second design structure 990.

Design structure 990 resides on a storage medium or programmable gatearray in a data format used for the exchange of data of mechanicaldevices and structures (e.g. information stored in a IGES, DXF,Parasolid XT, JT, DRG, or any other suitable format for storing orrendering such mechanical design structures). Similar to designstructure 920, design structure 990 preferably comprises one or morefiles, data structures, or other computer-encoded data or instructionsthat reside on transmission or data storage media and that whenprocessed by an ECAD system generate a logically or otherwisefunctionally equivalent form of one or more of the embodiments of theinvention shown in FIGS. 1 and 2. In one embodiment, design structure990 may comprise a compiled, executable HDL simulation model thatfunctionally simulates the devices shown in FIGS. 1 and 2.

Design structure 990 may also employ a data format used for the exchangeof layout data of integrated circuits and/or symbolic data format (e.g.information stored in a GDSII (GDS2), GL1, OASIS, map files, or anyother suitable format for storing such design data structures). Designstructure 990 may comprise information such as, for example, symbolicdata, map files, test data files, design content files, manufacturingdata, layout parameters, wires, levels of metal, vias, shapes, data forrouting through the manufacturing line, and any other data required by amanufacturer or other designer/developer to produce a device orstructure as described above and shown in FIGS. 1 and 2. Designstructure 990 may then proceed to a stage 995 where, for example, designstructure 990: proceeds to tape-out, is released to manufacturing, isreleased to a mask house, is sent to another design house, is sent backto the customer, etc.

The method as described above is used in the fabrication of integratedcircuit chips. The resulting integrated circuit chips can be distributedby the fabricator in raw wafer form (that is, as a single wafer that hasmultiple unpackaged chips), as a bare die, or in a packaged form. In thelatter case the chip is mounted in a single chip package (such as aplastic carrier, with leads that are affixed to a motherboard or otherhigher level carrier) or in a multichip package (such as a ceramiccarrier that has either or both surface interconnections or buriedinterconnections). In any case the chip is then integrated with otherchips, discrete circuit elements, and/or other signal processing devicesas part of either (a) an intermediate product, such as a motherboard, or(b) an end product. The end product can be any product that includesintegrated circuit chips, ranging from toys and other low-endapplications to advanced computer products having a display, a keyboardor other input device, and a central processor.

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the invention. Asused herein, the singular forms “a”, “an” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises”and/or “comprising,” when used in this specification, specify thepresence of stated features, integers, steps, operations, elements,and/or components, but do not preclude the presence or addition of oneor more other features, integers, steps, operations, elements,components, and/or groups thereof.

The corresponding structures, materials, acts, and equivalents of allmeans or step plus function elements in the claims, if applicable, areintended to include any structure, material, or act for performing thefunction in combination with other claimed elements as specificallyclaimed. The description of the present invention has been presented forpurposes of illustration and description, but is not intended to beexhaustive or limited to the invention in the form disclosed. Manymodifications and variations will be apparent to those of ordinary skillin the art without departing from the scope and spirit of the invention.The embodiment was chosen and described in order to best explain theprincipals of the invention and the practical application, and to enableothers of ordinary skill in the art to understand the invention forvarious embodiments with various modifications as are suited to theparticular use contemplated. Accordingly, while the invention has beendescribed in terms of embodiments, those of skill in the art willrecognize that the invention can be practiced with modifications and inthe spirit and scope of the appended claims.

1. A structure comprising: an integrated passive device chip having aplurality of through wafer vias, mounted to a ground plane; and at leastone CMOS device mounted on the integrated passive device chip using flipchip technology and being grounded to the ground plane through thethrough wafer vias of the integrated passive device chip.
 2. Thestructure of claim 1, wherein the through wafer vias extend entirelythrough the integrated passive device chip.
 3. The structure of claim 1,wherein the through wafer vias are non-insulated through wafer vias. 4.The structure of claim 1, wherein the integrated passive device chip ispositioned between the at least one CMOS device and the ground planesuch that the at least one CMOS device is remotely positioned from theground plane and does not make direct contact thereto.
 5. The structureof claim 1, wherein the through wafer vias are coupled to a metal backplane of the integrated passive device chip.
 6. The structure of claim1, wherein the ground plane is a package substrate.
 7. The structure ofclaim 1, further comprising bond pads mounted to the integrated passivedevice chip and wire bonds leading from the bond pads to signal lines.8. The structure of claim 7, wherein the at least one CMOS device isdevoid of the bond pads and through wafer vias.
 9. The structure ofclaim 1, wherein the at least one CMOS device is a shield for devices onthe integrated passive device chip.
 10. The structure of claim 1,wherein the at least one CMOS device is at least two CMOS devices. 11.The structure of claim 1, wherein the integrated passive device chip isa heat sink to the ground plane for the CMOS device.
 12. A structure,comprising: a package substrate; an integrated passive device chipmounted to the substrate package by a plurality of through wafer viasextending from a top surface to a bottom surface of the integratedpassive device chip; bond pads coupled to the integrated passive devicechip and wire bonds leading from the bond pads to signal lines; and atleast one CMOS device mounted on the integrated passive device chipusing flip chip technology and being grounded to the ground planethrough the integrated passive device chip and electrically connected tothe signal lines through the wire bonds extending from the integratedpassive device chip.
 13. The structure of claim 12, wherein the throughwafer vias extend entirely through the integrated passive device chip.14. The structure of claim 12, wherein the through wafer vias arenon-insulated through wafer vias.
 15. The structure of claim 12, whereinthe at least one CMOS device is mounted to a surface of the integratedpassive device chip, opposite of the package substrate.
 16. Thestructure of claim 12, wherein the through wafer vias are coupled to ametal back plane of the integrated passive device chip.
 17. Thestructure of claim 12, wherein the package substrate is a ground plane.18. The structure of claim 12, wherein the at least one CMOS device isdevoid of the bond pads and through wafer vias.
 19. The structure ofclaim 12, wherein the at least one CMOS device is a shield for deviceson the integrated passive device chip.
 20. A method of forming astructure, comprising: forming a plurality of through wafer vias in anintegrated passive device chip; mounting the integrated passive devicechip on a ground plane; and mounting at least one CMOS device withactive components on the integrated passive device chip using flip chiptechnology, the mounting grounds the at least one CMOS device to theground plane, wherein the at least one CMOS device is mounted to theintegrated passive device chip on a surface remote from the groundplane.